Model: ZMI-4004
Survey board
ZMI™ Series – Displacement measurement Interferometers
Features:
0.15 nm resolution
2.55 m/s speed
Each plate has 4 axes
10 MHz data rate
ST Optical fiber and HSSDC electrical connection
The Zygo ZMI-4004 4-axis VME64x measuring board enables the next generation of lithography tools to achieve significantly improved coverage and higher throughput. The ZMI-4004 is part of a total displacement measurement interferometer solution that ensures the highest resolution and speed while providing excellent dynamic accuracy and data age uncertainty.

Zmi-4004 ZMI Displacement measuring board
The ZMI™ displacement measuring board uses optical signals from an interferometer driven by a ZMI™ laser source to calculate displacement.

The ZMI™ 501A comes in a convenient self-contained housing that offers two measuring shafts.

The ZMI™ 2400, 4000, and 4100 series boards provide sub-nanometer resolution for the most challenging position metrology applications. These boards can be added modularistically to the VME chassis, supporting expansion to up to 64 measurement axes.

Our proprietary loop error reduction option automatically and seamlessly eliminates the inherent nonlinear errors common in DMI systems for maximum measurement accuracy.

Model: 501A 2400 4004 4104(C)
Number of shafts/plates: 2 1 or 2 4
Board type: Shell 6U VME 6U VME64x
Minimum optical power: 8.0µW 1.9µW 1.0µW 0.07µW
Position resolution: 1.24nm 0.31nm 0.15nm
Maximum speed: ± 0.475m /s ± 2.1m /s ± 2.55m /s
Accuracy (σ) at maximum speed: 1.6nm 0.5nm 0.2nm
Loop error compensation: No Yes
Compatible lasers: 7705 7702, 7714 and 7724
Note: Specifications are for dual-pass interferometers.