ZYGO ZMI4104 | Displacement measuring board | 51154724-100 | 875EC-D1U-A | ELAU DB-5

Model: ZYGO ZMI4104

Category: Displacement measuring plate

Delivery time: from stock

Delivery method: SF Express/Deppon

Warranty: One year

Model: 501A 2400 4004 4104(C)

Number of shafts/plates: 2 1 or 2 4

Board type: Shell 6U VME 6U VME64x

Minimum optical power: 8.0µW 1.9µW 1.0µW 0.07µW

Position resolution: 1.24nm 0.31nm 0.15nm

Maximum speed: ± 0.475m /s ± 2.1m /s ± 2.55m /s

Accuracy (σ) at maximum speed: 1.6nm 0.5nm 0.2nm

Loop error compensation: No Yes

Compatible lasers: 7705 7702, 7714 and 7724

Note: Specifications are for dual-pass interferometers.

Survey board

ZMI™ Series – Displacement measurement Interferometers

ZMI displacement measuring board

The ZYGO ZMI4104 ZMI™ displacement measuring board uses optical signals from an interferometer driven by a ZMI™ laser source to calculate displacement.

The ZMI™ 501A comes in a convenient self-contained housing that offers two measuring shafts.

The ZYGO ZMI4104 ZMI™ 2400, 4000, and 4100 series boards provide sub-nanometer resolution for the most challenging position metrology applications. These boards can be added modularistically to the VME chassis, supporting expansion to up to 64 measurement axes.